학술논문
A Comparative Study of a:SiCN:H Thin Films Fabricated with Acetylene and Methane
Document Type
Article
Author
Source
In: ECS Journal of Solid State Science and Technology . (ECS Journal of Solid State Science and Technology, January 2023, 12(1))
Subject
Language
English
ISSN
21628777
21628769
21628769