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Pile-Ups Formation in AFM-Based Nanolithography: Morpho-Mechanical Characterization and Removal Strategies

Document Type

Article

Author

Pellegrino, P.; Cascione, M.; De Matteis, V.; Vincenti, L.; Rinaldi, R.; Farella, I.; Torre, A.D.; Quaranta, F.; Bramanti, A.P.

Source

In: Micromachines. (Micromachines, 15 November 2022, 13(11))

Subject

Language

English

ISSN

2072666X

Online Access

Full Text (ProQuest Central) Full Text (Gale Academic Onefile) Open Access (EBSCO) Web of Science JCR 저널정보 Scopus Find it@PNU

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