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Structural and Elastic Properties of Empty-Pore Metalattices Extracted via Nondestructive Coherent Extreme UV Scatterometry and Electron Tomography

Document Type

Article

Author

Knobloch, J.L.; McBennett, B.; Bevis, C.S.; Frazer, T.D.; Adak, A.; Nelson, E.E.; Hernández-Charpak, J.N.; Kapteyn, H.C.; Abad, B.; Murnane, M.M.; Yazdi, S.; Cheng, H.Y.; Grede, A.J.; Nova, N.N.; Giebink, N.C.; Badding, J.V.; Mahale, P.; Mallouk, T.E.

Source

In: ACS Applied Materials and Interfaces. (ACS Applied Materials and Interfaces, 14 September 2022, 14(36):41316-41327)

Subject

Language

English

ISSN

19448252
19448244

Online Access

Full Text (ACS) Web of Science JCR 저널정보 Scopus Find it@PNU

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