학술논문

Fabrication of High-κ Dielectric Metal Oxide Films on Topographically Patterned Substrates: Polymer Brush-Mediated Depositions
Document Type
Article
Source
In: ACS Applied Materials and Interfaces. (ACS Applied Materials and Interfaces, 20 July 2022, 14(28):32729-32737)
Subject
Language
English
ISSN
19448252
19448244