학술논문
Conductive n-type gallium nitride thin films prepared by sputter deposition
Document Type
Article
Author
Source
In: Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films . (Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, 1 July 2022, 40(4))
Subject
Language
English
ISSN
15208559
07342101
07342101