학술논문
Modeling of the PolyMUMPs-Based MEMS Sensor for Application in Trace Gas Detection
Document Type
Conference Paper
Source
In: 2021 International Conference on Intelligent Cybernetics Technology and Applications, ICICyTA 2021 , 2021 International Conference on Intelligent Cybernetics Technology and Applications, ICICyTA 2021. (2021 International Conference on Intelligent Cybernetics Technology and Applications, ICICyTA 2021, 2021, :58-63)
Subject
Language
English