학술논문
Electrical Characteristics of Si0.8 Ge0.2 p-MOSFET With TMA Pre-Doping and NH3 Plasma IL Treatment
Document Type
Article
Author
Source
In: IEEE Transactions on Electron Devices . (IEEE Transactions on Electron Devices, 1 April 2022, 69(4):1776-1780)
Subject
Language
English
ISSN
15579646
00189383
00189383