학술논문
Characterization of Defect Structure in Epilayer Grown on On-Axis SiC by Synchrotron X-ray Topography
Document Type
Article
Author
Source
In: Journal of Electronic Materials . (Journal of Electronic Materials, April 2022, 51(4):1541-1547)
Subject
Language
English
ISSN
1543186X
03615235
03615235