학술논문
28nm-pitch Ru interconnects patterned with a 0.33NA-EUV single exposure
Document Type
Conference Paper
Author
Source
In: Proceedings of SPIE - The International Society for Optical Engineering , International Conference on Extreme Ultraviolet Lithography 2021. (Proceedings of SPIE - The International Society for Optical Engineering, 2021, 11854)
Subject
Language
English
ISSN
1996756X
0277786X
0277786X