학술논문
A Comparative Study of the Mechanical and Tribological Properties of Thin Al2 O3 Coatings Fabricated by Atomic Layer Deposition and Radio Frequency Sputtering
Document Type
Article
Author
Source
In: Physica Status Solidi (A) Applications and Materials Science . (Physica Status Solidi (A) Applications and Materials Science, January 2022, 219(1))
Subject
Language
English
ISSN
18626319
18626300
18626300