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Novel gas aggregation cluster source based on post magnetron

Document Type

Article

Author

Nikitin, D.; Hanuš, J.; Pleskunov, P.; Krtouš, Z.; Ali-Ogly, S.; Tafiichuk, R.; Biliak, K.; Protsak, M.; Choukourov, A.; Biederman, H.; Valter, J.; Vyskočil, J.

Source

In: Plasma Processes and Polymers. (Plasma Processes and Polymers, September 2021, 18(9))

Subject

Language

English

ISSN

16128869
16128850

Online Access

Full Text (Wiley Journals) Full Text (Wiley-DB) Web of Science JCR 저널정보 Scopus Find it@PNU

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