학술논문

Machine learning versus Deep Learning in Low Yield Wafer Map Classification
Document Type
Conference Paper
Source
In: ASMC (Advanced Semiconductor Manufacturing Conference) Proceedings, 2021 32nd Annual SEMI Advanced Semiconductor Manufacturing Conference, ASMC 2021. (ASMC (Advanced Semiconductor Manufacturing Conference) Proceedings, 10 May 2021, 2021-May)
Subject
Language
English
ISSN
10788743