학술논문
Surface kinetics and feature scale particle model of Si x N y atomic layer deposition using Si2 Cl6 precursor
Document Type
Article
Author
Source
In: Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films . (Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, 1 September 2020, 38(5))
Subject
Language
English
ISSN
15208559
07342101
07342101