학술논문
Electron beam lithography on curved or tilted surfaces: Simulations and experiments
Document Type
Article
Source
In: Journal of Vacuum Science and Technology B: Nanotechnology and Microelectronics . (Journal of Vacuum Science and Technology B: Nanotechnology and Microelectronics, 1 September 2019, 37(5))
Subject
Language
English
ISSN
21662754
21662746
21662746