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Improved homogeneity of plasma and coating properties using a lance matrix gas distribution in MW-PECVD
Document Type
Article
Author
Kirchheim, D.; Wilski, S.; Jaritz, M.; Hopmann, C.; Dahlmann, R.; Mitschker, F.; Oberberg, M.; Awakowicz, P.; Trieschmann, J.; Brinkmann, R.P.; Mussenbrock, T.; Banko, L.; Grochla, D.; Ludwig, A.; Brochhagen, M.; Böke, M.; Benedikt, J.; Schreckenberg, R.; de los Arcos, T.; Grundmeier, G.
Source
In: Journal of Coatings Technology and Research. (Journal of Coatings Technology and Research, 15 March 2019, 16(2):573-583)
Subject
Language
English
ISSN
15470091

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