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Influence of PE-CVD and PE-ALD on defect formation in permeation barrier films on PET and correlation to atomic oxygen fluence

Document Type

Article

Author

Mitschker, F.; Steves, S.; Rudolph, M.; Schücke, L.; Awakowicz, P.; Gebhard, M.; Devi, A.; Kirchheim, D.; Jaritz, M.; Dahlmann, R.; Hopmann, C.; Brochhagen, M.; Böke, M.; Benedikt, J.; Hoppe, C.; Giner, I.; De los Arcos, T.; Grundmeier, G.

Source

In: Journal of Physics D: Applied Physics. (Journal of Physics D: Applied Physics, 18 May 2017, 50(23))

Subject

Language

English

ISSN

13616463
00223727

Online Access

Full Text (IOP Science) Full Text (IOP) Web of Science JCR 저널정보 Scopus Find it@PNU

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