학술논문
Study of ion beam induced chemical effects in silicon with a downsized high resolution X-ray spectrometer for use with focused ion beams
Document Type
Article
Author
Source
In: Journal of Analytical Atomic Spectrometry . (Journal of Analytical Atomic Spectrometry, November 2016, 31(11):2293-2304)
Subject
Language
English
ISSN
13645544
02679477
02679477