학술논문
Scheduling of automated wet-etch stations
Document Type
Article
Author
Source
In: Chemical Engineering Transactions , PRES 2014 - Selected articles from 17th Conference on Process Integration, Modelling and Optimisation for Energy Saving and Pollution Reduction. (Chemical Engineering Transactions, 2014, 39 Special Issue:433-438)
Subject
Language
English
ISSN
22839216