학술논문
Metal micro drilling combining high power femtosecond laser and trepanning head
Document Type
Conference Paper
Author
Source
In: Proceedings of SPIE - The International Society for Optical Engineering , Laser-Based Micro- and Nanopackaging and Assembly VII. (Proceedings of SPIE - The International Society for Optical Engineering, 2013, 8608)
Subject
Language
English
ISSN
0277786X