학술논문
Fabrication of large dimension aluminum air-bridges for superconducting quantum circuits
Document Type
Article
Author
Source
In: Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics . (Journal of Vacuum Science and Technology B:Nanotechnology and Microelectronics, May 2013, 31(3))
Subject
Language
English
ISSN
21662754
21662746
21662746