학술논문
Fabrication technology of Si microfluidic devices for microbial cell trapping
Document Type
Conference Paper
Author
Source
In: Proceedings of SPIE - The International Society for Optical Engineering , Micromachining Technology for Micro-Optics and Nano-Optics V and Microfabrication Process Technology XII. (Proceedings of SPIE - The International Society for Optical Engineering, 2007, 6462)
Subject
Language
English
ISSN
0277786X