부산대학교 도서관

The present study reports the design and testing of a novel piezoelectric pneumatic actuator with a circular double-chip piezoelectric oscillator as the driving source to improve the precision driving and control accuracy of micromechanical pneumatic pressure. First, the theoretical and simulation analyses of the gas in the system were conducted, and the variation curves of the output thrust and speed of the pneumatic actuator with frequency were generated. Accordingly, a prototype was constructed and tested at a resonance frequency of 607.677Hz. The testing results revealed that the optimum loading pressure of the pneumatic actuator was 0.04MPa, and the maximum thrust force was87.14,which is 1.81 times the pressure of OMPa. The maximum output speed was 26.15mm/s, which is 1.29times the pressure of OMPa. After loading the appropriate pressure, the output speed, output thrust and output step of the pneumatic actuator increased, and the drive voltage and frequency exhibited a linearly increasing relationship within a certain range.