학술논문
Large scale programmable photonic circuits using silicon photonic MEMS
Document Type
Conference
Author
Source
2022 Conference on Lasers and Electro-Optics (CLEO) Lasers and Electro-Optics (CLEO), 2022 Conference on. :1-2 May, 2022
Subject
Language
Abstract
We demonstrate low-power and non-volatile MEMS actuators on an industrially established silicon photonics platform. The compact electrostatically actuated phase shifters and tunable couplers enable large-scale programmable photonic integrated circuits.