학술논문
A High-Sensitivity Mems Gravimeter without a Vacuum Chamber
Document Type
Conference
Author
Source
2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers) SSolid-State Sensors, Actuators and Microsystems (Transducers), 2021 21st International Conference on. :226-229 Jun, 2021
Subject
Language
ISSN
2167-0021
Abstract
This paper presents a high-sensitivity microelectromechanical system (MEMS) gravimeter that can operate without a vacuum chamber for long-term earth tide observations. The proposed MEMS gravimeter system can be greatly simplified, including a spring-mass acceleration unit and a controlled temperature environment. To operate without the vacuum chamber, the effect of air buoyancy on the output signal is investigated and corrected in the time domain. A strong correlation between the corrected output of the gravimeter and the theoretical tidal signal is observed. The MEMS gravimeter shows an ultra-low noise floor of ~2 µGal/√Hz at 1 Hz and superior stability, indicating the potential for the mass production of MEMS gravimeters that can operate without any vacuum unit.