학술논문
Methods for Measuring Microwave Properties of Ferroelectric Films
Document Type
Conference
Author
Source
2021 Radiation and Scattering of Electromagnetic Waves (RSEMW) Radiation and Scattering of Electromagnetic Waves (RSEMW), 2021. :231-234 Jun, 2021
Subject
Language
Abstract
Describes developed and used methods for measuring dielectric constant and loss ferroelectric films. The coplanar waveguide method is used to measure the dielectric constant in the range from 1 MHz to 8 … 10 GHz. Prismatic and cylindrical cavity resonators were used for non-destructive testing of permeability and losses. The results of measurement of strontium titanate parameters of films obtained by high-frequency magnetron sputtering of a stoichiometric target in an oxygen atmosphere at a pressure of 1 … 3 mm Hg are presented.