학술논문

Optical and structural studies of compositional inhomogeneity in strain-relaxed indium gallium nitride films
Document Type
Conference
Source
2000 IEEE International Symposium on Compound Semiconductors. Proceedings of the IEEE Twenty-Seventh International Symposium on Compound Semiconductors (Cat. No.00TH8498) Compound semiconductors Compound Semiconductors, 2000 IEEE International Symposium on. :507-512 2000
Subject
Components, Circuits, Devices and Systems
Engineered Materials, Dielectrics and Plasmas
Photonics and Electrooptics
Optical films
Indium
X-ray scattering
Gallium nitride
Spectroscopy
III-V semiconductor materials
Chemical vapor deposition
X-ray diffraction
Optical diffraction
Electromagnetic wave absorption
Language
Abstract
The structural and optical properties of indium gallium nitride (In/sub x/Ga/sub 1-x/N) films with 0.04