학술논문
Highly Responsive Metal Oxide (V2O5)-Based NEMS Pirani Gauge for In-Situ Hermeticity Monitoring
Document Type
Periodical
Author
Source
Journal of Microelectromechanical Systems J. Microelectromech. Syst. Microelectromechanical Systems, Journal of. 30(3):340-342 Jun, 2021
Subject
Language
ISSN
1057-7157
1941-0158
1941-0158
Abstract
The letter reports highly sensitive metal oxide (V 2 O 5 ) based NanoElectromechanical Systems (NEMS) Pirani gauge for pressure monitoring of a packaged device. The absence of additional supplementary material in the sensing element increases the sensing area and enables the in-situ monitoring capability. Considering the feasibility of the idea, the design is simulated and verified with the experimental results of the fabricated device. The device shows a sensitivity of 5.76 % per decade-Pa in the working range from 4 Pa to $2.7\times 10^{3}$ Pa. The maximum average temperature of the sensing element is 48 °C at 4 Pa. It ensures corrosion-free operation and increases the lifetime of the device. The computed thermal response time of the device is ~500 ms at a power consumption of $285\mu \text{W}$ . [2020-0335]