학술논문
Ultra Low-Loss Silicon Waveguides for 200 mm Photonics Platform
Document Type
Conference
Author
Source
2019 IEEE 16th International Conference on Group IV Photonics (GFP) Group IV Photonics (GFP), 2019 IEEE 16th International Conference on. :1-2 Aug, 2019
Subject
Language
ISSN
1949-209X
Abstract
We demonstrate ultra-low optical losses in silicon waveguide by applying a smoothing annealing with no morphological deformation. We reach record-low losses at 1310nm with 0.1 dB/cm in single mode waveguide, while the performances of the other devices of the platform are preserved.