학술논문

MEMS endomicroscope for simultaneous bright-field microscopy and optical coherence tomography
Document Type
Conference
Source
2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS) Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), 2015 Transducers - 2015 18th International Conference on. :216-219 Jun, 2015
Subject
Bioengineering
Communication, Networking and Broadcast Technologies
Components, Circuits, Devices and Systems
Computing and Processing
Engineered Materials, Dielectrics and Plasmas
Fields, Waves and Electromagnetics
Photonics and Electrooptics
Power, Energy and Industry Applications
Robotics and Control Systems
Signal Processing and Analysis
Transportation
Image resolution
Optical device fabrication
Optical imaging
Micromechanical devices
Lithography
Silicon compounds
Multi-modal imaging
optical coherence tomography
bright-field microscopy
silicon optical bench
Language
ISSN
2159-547X
2164-1641
Abstract
We present the first silicon-based endomicroscope that combines wide field and confocal imaging modalities in a single device, whose functionality includes simultaneous operation of bright-field microscopy and optical coherence tomography (OCT). This highly-compact multi-modal probe is based on silicon bulk micromachining and has cross-sectional dimensions of 2×2.76mm 2 . The achieved lateral resolutions are 6.2 µm and 17.8 µm for bright-field microscopy and OCT, respectively.