학술논문
A new characterization method for accurate capacitor matching measurements using pseudo-floating gate test structures in submicron CMOS and BiCMOS technologies
Document Type
Conference
Source
ICMTS 1998. Proceedings of 1998 International Conference on Microelectronic Test Structures (Cat. No.98CH36157) Microelectronic test structures Microelectronic Test Structures, 1998. ICMTS 1998., Proceedings of the 1998 International Conference on. :223-227 1998
Subject
Language
Abstract
In deep submicron CMOS and BiCMOS technologies, antenna effects affect the floating gate charge of conventional floating gate test structures, dedicated to capacitor matching measurement. In this paper, a new pseudo-floating gate test structure is designed. After test structure and modeling presentation, the testing method and results are given for several capacitor layouts (poly-poly and metal-metal).