학술논문
Optical waveguides in SIMOX structures
Document Type
Periodical
Author
Source
IEEE Photonics Technology Letters IEEE Photon. Technol. Lett. Photonics Technology Letters, IEEE. 3(1):19-21 Jan, 1991
Subject
Language
ISSN
1041-1135
1941-0174
1941-0174
Abstract
Propagation characteristics determined experimentally and theoretically for planar optical waveguides formed in separation by implantation of oxygen (SIMOX) structures are discussed. All samples were found to support both TE and TM modes at both 1.15 mu m and 1.523 mu m with a lowest propagation loss of 8 dB/cm. This loss was measured at a wavelength of 1.15 mu m for the TE/sub 0/ mode of a planar waveguide with a 2.0- mu m-thick Si guiding layer.