학술논문

12.9 A 1.55×0.85mm2 3ppm 1.0μA 32.768kHz MEMS-based oscillator
Document Type
Conference
Source
2014 IEEE International Solid-State Circuits Conference Digest of Technical Papers (ISSCC) Solid-State Circuits Conference Digest of Technical Papers (ISSCC), 2014 IEEE International. :226-227 Feb, 2014
Subject
Components, Circuits, Devices and Systems
General Topics for Engineers
Oscillators
Micromechanical devices
Resonant frequency
Circuit stability
Thermal stability
CMOS integrated circuits
Temperature measurement
Language
ISSN
0193-6530
2376-8606
Abstract
Mobile time-keeping applications require small form-factor, tight frequency stability, and micro-power 32.768kHz clock references. Today's 32kHz quartz resonators and oscillators are facing challenges in size reduction [1,2]. Previously described MEMS-based oscillators can achieve tight accuracy but operate at high frequency with power unsuitable for mobile applications [3]. This paper introduces a 32kHz MEMS-based oscillator. Based on a comparison table of recent oscillators shown in Fig. 12.9.6, it offers the smallest size, 1.55×0.85mm 2 , with the best frequency stability, 100ppm (XO) and 3ppm (TCXO) over the industrial temperature range of −40 to 85°C. Supply current is 0.9 and 1.0μA for XO and TCXO, respectively, at supply voltages from 1.5 to 3.6V.