학술논문
Microfabrication and parallel operation of 5/spl times/5 2D AFM cantilever arrays for data storage and imaging
Document Type
Conference
Author
Source
Proceedings MEMS 98. IEEE. Eleventh Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems (Cat. No.98CH36176 Micro electro mechanical systems Micro Electro Mechanical Systems, 1998. MEMS 98. Proceedings., The Eleventh Annual International Workshop on. :8-11 1998
Subject
Language
ISSN
1084-6999
Abstract
In this paper we report on the microfabrication of a 5/spl times/5 2D cantilever array and its successful application to parallel imaging. The 5/spl times/5 array with integrated force sensing and tip heating has been fabricated using a recently developed, all dry silicon backside etching process. The levers on the array have integrated piezoresistive sensing. The array is scanned in x and y directions using voice coil actuators. Three additional voice coil z actuators are used in a triangular arrangement to approach the sample with the array chip. The system is thus leveled in the same way as an air table. We report details of the array fabrication, the x-y scanning and approach system as well as images taken with the system.