학술논문

16 Mb DRAM/SOI technologies for sub-1 V operation
Document Type
Conference
Source
International Electron Devices Meeting. Technical Digest Electron devices Electron Devices Meeting, 1996. IEDM '96., International. :609-612 1996
Subject
Components, Circuits, Devices and Systems
Engineered Materials, Dielectrics and Plasmas
Photonics and Electrooptics
Random access memory
Low voltage
Isolation technology
Capacitors
CMOS technology
Voltage control
MOSFET circuits
Substrates
Ultra large scale integration
Laboratories
Language
ISSN
0163-1918
Abstract
Extra low voltage DRAM/SOI technologies were developed using (1) modified MESA isolation without parasitic MOS operation, (2) dual gate CMOS for low Vth control, (3) optimized layout using both body-tied and floating body MOSFETs, and (4) reduced Cb/Cs ratio. Completely redesigned low voltage scheme 16 MDRAM/SOI was successfully realized and functional operation was obtained at very low supply voltage below 1 V.