부산대학교 도서관

This article demonstrates a linearized temperature measurement system based on the B-mode of SC-cut quartz crystal, which has high precision and good linearity. The proposed system uses a digital linear phase comparison measurement method by selecting a phase detection region, which achieves high resolution and fast response for temperature measurement. Extensive error analysis and performance evaluation of the system were conducted in this study. The developed linearized temperature measurement system demonstrated excellent performance, including a wide temperature measuring range from (−10 °C to 80 °C), providing sufficient resolution and extremely fast response time with a resolution of 0.01 °C at $10~\mu \text{s}$ , a resolution of 5E-5 °C at 10 ms, and a resolution of 1E-7 °C at 1 s when the temperature keeps stable. It achieves an extremely low-temperature measurement relative error (R.E. < 0.24%) and nonlinearity (N.L. < 0.18%). The measurement results show that the maximum estimate of the Allan variance is 2.3E-4 °C. The proposed system has wide prospects for intelligent applications and can play a crucial role in scenarios that require high-precision and fast-response temperature measurements.