학술논문

Fracture Mechanism of Sintered Silver Film Revealed by In Situ SEM Uniaxial Tensile Loading
Document Type
Periodical
Source
IEEE Transactions on Components, Packaging and Manufacturing Technology IEEE Trans. Compon., Packag. Manufact. Technol. Components, Packaging and Manufacturing Technology, IEEE Transactions on. 14(2):240-250 Feb, 2024
Subject
Components, Circuits, Devices and Systems
Engineered Materials, Dielectrics and Plasmas
Loading
Surface cracks
Silicon
Scanning electron microscopy
Testing
Stress
Thermal shock
Fracture mechanism
in situ scanning electron microscopy (SEM) tensile testing
power electronics
reliability design
sintered silver (s-Ag)
Language
ISSN
2156-3950
2156-3985
Abstract
This article investigates the mechanism of brittle-ductile deformation and fracture for sintered silver (s-Ag) film by means of in situ scanning electron microscopy (SEM) uniaxial tensile loading at room temperature (RT) and 300 °C. The s-Ag film specimen originating from nano-Ag paste, including 18-nm-diameter Ag particles, is sintered at 300 °C under 60-MPa pressure. A precrack and slope surface are fabricated in the s-Ag specimen with a focused ion beam (FIB) for conducting in situ SEM observation during applied tensile loading. A local in situ SEM observation area is set to $8\times 5\,\,\mu \text{m}^{2}$ around the specimen’s precrack tip. At RT, the s-Ag specimen shows a brittle fracture, whereas at 300 °C, the s-Ag specimen shows a ductile fracture with microstructural changes involving pore growth and grain boundary degradation. However, fracture surface morphology provides the opposite impression, where the fracture surface at 300 °C looks like an intergranular fracture. Finite-element analyses (FEAs) and electron backscatter diffraction (EBSD) suggest that the stress in the plastic region can accelerate the microstructure changes. The Ag atomic gliding speed at the grain boundary determines brittle-ductile deformation and fracture characteristics in s-Ag film. The reason why fracture surface impression differs from actual deformation is discussed using detailed snapshots during the fracture of s-Ag film at 300 °C.