학술논문

Intercalated Graphene as Next Generation Back-end-of-Line Conductors
Document Type
Conference
Source
2023 International Electron Devices Meeting (IEDM) Electron Devices Meeting (IEDM), 2023 International. :i-iv Dec, 2023
Subject
Bioengineering
Communication, Networking and Broadcast Technologies
Components, Circuits, Devices and Systems
Computing and Processing
Engineered Materials, Dielectrics and Plasmas
Fields, Waves and Electromagnetics
Nuclear Engineering
Photonics and Electrooptics
Power, Energy and Industry Applications
Robotics and Control Systems
Signal Processing and Analysis
Symbiosis
Graphene
Metals
Conductivity
Conductors
Nanoribbons
Next generation networking
Language
ISSN
2156-017X
Abstract
Research on adopting graphene nanoribbons for conductor application has been at the forefront for over a decade. However, the exhibited high film and contact resistivities with metals have been prohibiting so far the practical realization of graphene conductors. In this work we propose a symbiotic graphene intercalation and edge-contact architecture to reduce both film and contact resistivities of graphene. Our results show two-fold achievements: 1) a film resistivity lower than Cu below 150 Å thickness, and 2) four orders reduction on specific contact resistivity. Furthermore, a comprehensive simulation workflow is proposed based on density functional theory to screen for novel intercalant materials not yet explored. The model points to the discovery of n-type metals as potentially promising candidates to further improve intercalated graphene’s electrical properties.