부산대학교 도서관

Zinc oxide thin films doped with fluorine (FZO) were deposited by the ultrasonic chemical spray technique. Different starting solutions from unmilled and milled Zn precursor were prepared, and then FZO films were deposited on soda-lime substrates. For milling the precursors, a planetary ball mill opered at constant speed and time, 500 rpm and 60 min, respectively, was used. FZO films were processed at constant deposition temperature, 450°C, and two deposition times, 8 and 14 min. The results reveal that, under the same deposition parameters, the electrical properties of FZO thin films deposited from milled precursor are better than those obtained for films deposited from starting solutions prepared from unmilled precursors.X-ray diffraction analysis confirmed that all films spectra fit well with the hexagonal wurtzite structure, presenting a preferential orientation along the (002) planes. The surface morphology characterization, carried out by scanning electron microscopy (SEM), showed changes with the milling process of the Zn precursor, passing from a triangular-shaped grains with unmilled precursors to thin sheets with hexagonal shapes with those milled. The use of a grinded precursor to prepare the starting solutions to deposit FZO thin films by the USP technique influences their physical properties.