학술논문
Nd–Fe–B Thick-Film Magnets on Si Substrates With Al–O Underlayers
Document Type
Periodical
Author
Source
IEEE Transactions on Magnetics IEEE Trans. Magn. Magnetics, IEEE Transactions on. 59(11):1-4 Nov, 2023
Subject
Language
ISSN
0018-9464
1941-0069
1941-0069
Abstract
We previously developed thick Nd–Fe–B films on Si substrates with glass underlayers using pulsed laser deposition (PLD). However, the glass layers had inhomogeneous structures, with voids due to the emission of large particles (droplets), making them unsuitable for micromagnetization. Additionally, knicks in the films’ hysteresis loop squareness were observed. In this study, we present a novel approach to fabricating Nd–Fe–B films on an Al–O film (with a target composition of Al2O3) instead of a glass film on a Si substrate. We observed a reduction in the number and sizes of large particles (droplets) in the Al–O film compared to the glass film. Furthermore, using an Al–O underlayer led to an improvement in the squareness of the hysteresis loop.