학술논문
Yield Methodology and Heater Process Variation in Phase Change Memory (PCM) Technology for Analog Computing
Document Type
Periodical
Author
Source
IEEE Transactions on Semiconductor Manufacturing IEEE Trans. Semicond. Manufact. Semiconductor Manufacturing, IEEE Transactions on. 36(3):327-331 Aug, 2023
Subject
Language
ISSN
0894-6507
1558-2345
1558-2345
Abstract
We discuss inline electrical testing to monitor the baseline of Analog Computing hardware using Phase Change Memory (PCM) technology. Tightening the PCM resistance distribution is necessary to meet analog computation requirement. A new yield methodology is introduced. A study of heater process variation, which will affect the heater height and the PCM resistance, will be discussed.