부산대학교 도서관

The effects of annealing and variation of temperature on the electrical and thermoelectric properties of e-beam evaporated InSe thin films has been investigated in details. The XRD study demonstrates that the as-deposited InSe thin films are amorphous while they become polycrystalline with the presence of In3Se4 phase after annealing. The SEM micrographs reveal that the surfaces of as-deposited films are smooth whereas they become non-uniform due to annealing. The heating and cooling cycles of the as-deposited films exhibit that the resistivity of the films shows an irreversible phase-transition and become stable after 3-4 successive heat-treatment operations in air. The electrical conductivity of annealed InSe thin films shows a highly degenerate semiconducting (metallic) behavior. The thermopower of the annealed films indicates that InSe thin film is a highly degenerate n-type semiconductor i.e. metallic. Thickness dependence thermopower obeys the Fuchs-Sondheimer theory. The optical band gap of the annealed films increases as compared to the as-deposited films. These results indicate that InSe thin films encounter a phase-transformation from In2Se3 to a new In3Se4 metallic phase with an optical band gap of ~1.8 eV due to heat-treatment.
Comment: 25 pages, 16 figures