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Clarification of Geometric Effects on Long-term Structural Stability of Ti/Au Multi-layered Micro-cantilevers

Document Type

Article

Author

Miyai, Ryosuke; Kurioka, Tomoyuki; Chen, Chun-Yi; Chang, Tso-Fu Mark; Onishi, Akira; Chakraborty, Parthojit; Machida, Katsuyuki; Ito, Hiroyuki; Miyake, Yoshihiro; Sone, Masato

Source

In Micro and Nano Engineering June 2024 23

Subject

Language

ISSN

2590-0072

Online Access

Full Text (ScienceDirect 종량제) Full Text (ScienceDirect O/A) JCR 저널정보 Scopus Find it@PNU

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