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A TiNiPd thin film microvalve for high temperature applications

Document Type

Article

Author

Liu, Y; Kohl, M; Okutsu, K; Miyazaki, S

Source

In Materials Science & Engineering A 2004 378(1):205-209

Subject

Language

ISSN

0921-5093

Online Access

Full Text (ScienceDirect) Web of Science JCR 저널정보 Scopus Find it@PNU

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