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Galvanodynamic probing of tribologically assisted material removal under chemical control: A cobalt/copper case study for application in chemical mechanical planarization

Document Type

Article

Author

Wei, S.; Roy, D.

Source

In Tribology International January 2023 179

Subject

Language

ISSN

0301-679X

Online Access

Full Text (ScienceDirect 종량제) Web of Science JCR 저널정보 Scopus Find it@PNU

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