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Spectroscopic study on amorphous tantalum oxynitride thin films prepared by reactive gas-timing RF magnetron sputtering

Document Type

Article

Author

Lertvanithphol, T.; Rakreungdet, W.; Chananonnawathorn, C.; Eiamchai, P.; Limwichean, S.; Nuntawong, N.; Patthanasettakul, V.; Klamchuen, A.; Khemasiri, N.; Nukeaw, J.; Seawsakul, K.; Songsiriritthigul, C.; Chanlek, N.; Nakajima, H.; Songsiriritthigul, P.; Horprathum, M.

Source

In Applied Surface Science 30 October 2019 492:99-107

Subject

Language

ISSN

0169-4332

Online Access

Full Text (ScienceDirect) Web of Science JCR 저널정보 Scopus Find it@PNU

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