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Synthesis of Cu doped TiN composite films deposited by pulsed bias arc ion plating

Document Type

Article

Author

Zhang, L.; Ma, G.J.; Lin, G.Q.; Han, K.C.; Ma, H.

Source

In Nuclear Inst. and Methods in Physics Research, B 1 February 2014 320:17-21

Subject

Language

ISSN

0168-583X

Online Access

Full Text (ScienceDirect 종량제) Web of Science JCR 저널정보 Scopus Find it@PNU

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