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Three-dimensional fabrication of free-standing epitaxial semiconductor nanostructures obtained by focused ion beam

Document Type

Article

Author

Giliberti, V.; Sakat, E.; Baldassarre, L.; Di Gaspare, A.; Notargiacomo, A.; Giovine, E.; Frigerio, J.; Isella, G.; Melli, M.; Weber-Bargioni, A.; Aloni, S.; Sassolini, S.; Cabrini, S.; Biagioni, P.; Ortolani, M.; Bollani, M.

Source

In Microelectronic Engineering 15 June 2015 141:168-172

Subject

Language

ISSN

0167-9317

Online Access

Full Text (ScienceDirect) Web of Science JCR 저널정보 Scopus Find it@PNU

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