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Influence of Al doping and annealing on the microstructures and electrical properties of CrSi films prepared by magnetron co-sputtering

Document Type

Article

Author

Ma, H.; Ma, Y.J.; Han, X.T.; Chen, J.H.; Yang, Z.; Ta, S.W.; Zhang, Y.W.; Zhang, Z.Y.; Cao, Z.H.

Source

In Vacuum April 2023 210

Subject

Language

ISSN

0042-207X

Online Access

Full Text (ScienceDirect) Web of Science JCR 저널정보 Scopus Find it@PNU

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