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Si passivation for Ge pMOSFETs: Impact of Si cap growth conditions

Document Type

Article

Author

Vincent, B.; Loo, R.; Vandervorst, W.; Delmotte, J.; Douhard, B.; Valev, V.K.; Vanbel, M.; Verbiest, T.; Rip, J.; Brijs, B.; Conard, T.; Claypool, C.; Takeuchi, S.; Zaima, S.; Mitard, J.; De Jaeger, B.; Dekoster, J.; Caymax, M.

Source

In Solid State Electronics 2011 60(1):116-121

Subject

Language

ISSN

0038-1101

Online Access

Full Text (ScienceDirect) Web of Science JCR 저널정보 Scopus Find it@PNU

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