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Effects of the annealing of amorphous Ta2O5 coatings produced by ion beam sputtering concerning the effusion of argon and the chemical composition

Document Type

Article

Author

Paolone, A.; Placidi, E.; Stellino, E.; Betti, M.G.; Majorana, E.; Mariani, C.; Nucara, A.; Palumbo, O.; Postorino, P.; Rago, I.; Trequattrini, F.; Granata, M.; Teillon, J.; Hofman, D.; Michel, C.; Lemaitre, A.; Shcheblanov, N.; Cagnoli, G.; Ricci, F.

Source

In Journal of Non-Crystalline Solids 1 April 2021 557

Subject

Language

ISSN

0022-3093

Online Access

Full Text (ScienceDirect 종량제) Web of Science JCR 저널정보 Scopus Find it@PNU

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